Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)

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Publication details: Bellingham, WA SPIE c2005Description: xl, 282 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.36 JON (Browse shelf(Opens below))	Available		277418

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First conference has title: Micromachining technology for micro-optics. Includes bibliographical references and author index

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