Micromachining and microfabrication process technology XV : 26 January 2010, San Francisco, California, United States Mary Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored and published by SPIE

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Publication details: Bellingham, WA SPIE c2010Description: 1 v. (various pagings) : ill. ; 27 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 MAH (Browse shelf(Opens below))	Available		423978

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