Micromachining and microfabrication process technology XIII : 22-23 January 2008, San Jose, California, USA Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)

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Publication details: Bellingham, WA SPIE c2008Description: 1 v. (various pagings) : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 MAH (Browse shelf(Opens below))	Available		277495

Includes bibliographical references and author index

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