Micromachining and microfabrication process technology IX : 27-29 January 2004, San Jose, California, USA Mary Ann Maher, Jerome F. Jakubczak, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

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Publication details: Bellingham, WA SPIE c2004Description: xxii, 276 p. : ill. (some col.) ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	671.35 MAH (Browse shelf(Opens below))	Available		424009

Includes bibliographical references and author index

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