Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.]

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Publication details: Bellingham, WA SPIE 2000Description: xv, 194 p. : ill. ; 28 cmISBN:

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Current library	Call number	Status	Date due	Barcode
Anna Centenary Library	621.3815 MAC (Browse shelf(Opens below))	Available		424035

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Includes bibliographical references and index

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