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Microelectronic device technology III : 22-23 September 1999, Santa Clara, California David Burnett, Toshiaki Tsuchiya, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.]

Contributor(s): Publication details: Bellingham, WA SPIE c1999Description: ix, 304 p. : ill. ; 28 cmISBN:
  • 9780819434784
ISSN:
  • 2002265194
Subject(s): DDC classification:
  • 621.38152 BUR
Item type: Books
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Current library Call number Status Date due Barcode
Anna Centenary Library 621.38152 BUR (Browse shelf(Opens below)) Available 424006

Includes bibliographical references and index

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