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Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA (Record no. 9733)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01257nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2003##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819448439 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2004296373 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 HER |
| 245 ## - TITLE STATEMENT | |
| Title | Metrology, inspection, and process control for microlithography XVII : 24-27 February, 2003, Santa Clara, California, USA |
| Statement of responsibility, etc. | Daniel J. Herr, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | c2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 2 v. (xxvii, 1248 p.) : ill. (some col.) ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits - Inspection - Congresses |
| Topical term or geographic name entry element | Integrated circuits - Measurement - Congresses |
| Topical term or geographic name entry element | Microlithography - Congresses |
| Topical term or geographic name entry element | Process control - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Herr, Daniel J |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | df95f488ac10000c56adbf53a0b5875c |
| 991 ## - | |
| -- | 372062 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.381531 HER | 277414 | 09.10.2020 | 09.10.2020 | English Books | |||||
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.381531 HER | 277415 | 09.10.2020 | 09.10.2020 | English Books |