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MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA (Record no. 8690)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01432nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2001##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819442871 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2001279011 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 HEL |
| 245 ## - TITLE STATEMENT | |
| Title | MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA |
| Statement of responsibility, etc. | Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxvii, 190 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Manufacturing processes - Congresses |
| Topical term or geographic name entry element | Microelectromechanical systems - Design and construction - Congresses |
| Topical term or geographic name entry element | Microelectromechanical systems - Industrial applications - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Helvajian, Henry |
| Personal name | Janson, Siegfried W |
| Personal name | Lärmer, Franz |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, United States. Defense Advanced Research Projects Agency |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | ea404497ac10000c6873059df54e479c |
| 991 ## - | |
| -- | 377445 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| pbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.381 HEL | 277489 | 09.10.2020 | 09.10.2020 | English Books |