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Ultra clean processing of silicon surfaces V (Record no. 84727)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00611nam a2200205Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2003##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783908450788 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 HEY |
| 245 ## - TITLE STATEMENT | |
| Title | Ultra clean processing of silicon surfaces V |
| Statement of responsibility, etc | edited by Marc Heyns,Paul Mertens and Marc Meuris |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Switzerland |
| Name of publisher | Scitec Publications |
| Year of publication | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiii, 311p. ; 25 cm |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Clean processing |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Heyns, Marc |
| Personal name | Mertens, Paul |
| Personal name | Meuris, Marc |
| 991 ## - | |
| -- | 156663 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.38152 HEY | 387317 | 09.10.2020 | English Books |