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Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 (Record no. 84725)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00846nam a2200229Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s1999##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9783908450405 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 HEY |
| 245 ## - TITLE STATEMENT | |
| Title | Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 |
| Statement of responsibility, etc | editors, Marc Heybs, Marc Meuris and Paul Mertens |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Switzerland |
| Name of publisher | Scitec Publications |
| Year of publication | 1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv, 301 p. : ill. ; 25 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Silicon surfaces |
| Topical Term | Ultra clean processing |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Heybs, Marc |
| Personal name | Mertens, Paul |
| Personal name | Meuris, Marc |
| 991 ## - | |
| -- | 164197 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.38152 HEY | 387684 | 09.10.2020 | English Books |