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Tribology in chemical-mechanical planarization (Record no. 83093)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00731nam a2200241Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2005##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780824725679 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.92 LIA |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Liang, Hong |
| 245 ## - TITLE STATEMENT | |
| Title | Tribology in chemical-mechanical planarization |
| Statement of responsibility, etc | Hong Liang, David Craven |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Boca Raton, FL |
| Name of publisher | Taylor & Francis |
| Year of publication | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 185 p. : ill. ; 25 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Chemical mechanical planarization |
| Topical Term | Grinding and polishing |
| Topical Term | Tribology |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Craven, David R |
| 991 ## - | |
| -- | 206398 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.92 LIA | 144520 | 09.10.2020 | English Books |