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The science and engineering of microelectronic fabrication (Record no. 68896)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00681nam a2200217Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2001##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780195136050 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 CAM |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Campbell, Stephen A |
| 245 ## - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication |
| Statement of responsibility, etc | Stephen A. Campbell |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Oxford |
| Name of publisher | Oxford University Press |
| Year of publication | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv, 603 p. : ill. ; 24 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Semiconductors - Design and construction |
| 991 ## - | |
| -- | 156519 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.38152 CAM | 113870 | 09.10.2020 | English Books |