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Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA (Record no. 5300)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01248nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2000##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819438317 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2001267484 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 671.35 VLA |
| 245 ## - TITLE STATEMENT | |
| Title | Materials and device characterization in micromachining III : 18-19 September 2000, Santa Clara, USA |
| Statement of responsibility, etc. | Yuli Vladimirsky, Philip J. Coane, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | c2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 200 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electromechanical devices - Congresses |
| Topical term or geographic name entry element | Micromachining - Congresses |
| Topical term or geographic name entry element | Micromechanics - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Coane, Philip J |
| Personal name | Vladimirsky, Yuli |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | a76cfed5ac10000c25fe60032e056c62 |
| 991 ## - | |
| -- | 342436 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 671.35 VLA | 277376 | 09.10.2020 | 09.10.2020 | English Books |