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Pulsed and pulsed bias sputtering : principles and applications (Record no. 47419)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00717nam a2200229Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2003##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781402075438 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2003054987 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 BAR |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Barnat, Edward V |
| 245 ## - TITLE STATEMENT | |
| Title | Pulsed and pulsed bias sputtering : principles and applications |
| Statement of responsibility, etc. | by Edward V. Barnat, Toh-Ming Lu |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boston |
| Name of publisher, distributor, etc. | Kluwer Academic |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | x, 155 p. : ill. ; 24 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Cathode sputtering (Plating process) |
| Topical term or geographic name entry element | Thin films |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lu, T. -M |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | 153db06dac10000c0dbc650cc12e2e02 |
| 991 ## - | |
| -- | 269166 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| hbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.38152 BAR | 210944 | 09.10.2020 | 09.10.2020 | English Books |