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Sub-half-micron lithography for ULSIs (Record no. 395500)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00876nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2000##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780521022347 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.395 SUZ |
| 245 ## - TITLE STATEMENT | |
| Title | Sub-half-micron lithography for ULSIs |
| Statement of responsibility, etc | edited by Katsumi Suzuki, Shinji Matsui, and Yukinori Ochiai |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Cambridge |
| Name of publisher | Cambridge University Press |
| Year of publication | 2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xvii, 323 p. : ill. ; 25 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Ultra large scale integration - Design and construction |
| Topical Term | Microlithography |
| Topical Term | Printed circuits - Design and construction |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Matsui, Shinji |
| Personal name | Ochiai, Yukinori |
| Personal name | Suzuki, Katsumi |
| 991 ## - | |
| -- | 193480 |
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