Search the Library Catalogue
Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA (Record no. 383849)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01064nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2008##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819471093 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 LEV |
| 245 ## - TITLE STATEMENT | |
| Title | Optical microlithography XXI : 26-29 February 2008, San Jose, California, USA |
| Statement of responsibility, etc | Harry J. Levinson, Mircea V. Dusa, editors ; sponsored and published by SPIE ; cooperating organization, SEMATECH (USA) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c2008 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 3 v. : ill. (some col. ) ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Masks - Congresses |
| Topical Term | Manufacturing processes - Congresses |
| Topical Term | Microlithography - Congresses |
| Topical Term | X-ray lithography - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Dusa, Mircea V |
| Personal name | Levinson, Harry J |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | International SEMATECH, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 367755 |
No items available.