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Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California (Record no. 381144)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01150nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s1999##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 819434809 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | TK7874.75 .M86 1999 621.39/5 |
| 245 ## - TITLE STATEMENT | |
| Title | Multilevel interconnect technology III : 22-23 September 1999, Santa Clara, California |
| Statement of responsibility, etc | Mart Graef, Divyesh N. Patel, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | ix, 184 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Dielectric films - Congresses |
| Topical Term | Integrated circuits - Very large scale integration - Design and construction - Congresses |
| Topical Term | Metallizing - Congresses |
| Topical Term | Plasma etching - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Graef, Mart |
| Personal name | Patel, Divyesh N |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Electrochemical Society, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 376238 |
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