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Advances in resist technology and processing XVII : 28 February-1 march, 2000, Santa Clara, USA (Record no. 363610)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00647nam a2200205Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2000##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819436177 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 686.2325 HOU |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Houlihan, Francis M |
| 245 ## - TITLE STATEMENT | |
| Title | Advances in resist technology and processing XVII : 28 February-1 march, 2000, Santa Clara, USA |
| Statement of responsibility, etc | Houlihan, Francis M |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | 2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xvii, 618 p. : ill. ; 29 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microlithography |
| Topical Term | Photoresists |
| 991 ## - | |
| -- | 348429 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 17.10.2020 | 686.2325 HOU | 276788 | 17.10.2020 | English Books | ||||
| Anna Centenary Library | Anna Centenary Library | 17.10.2020 | 686.2325 HOU | 276789 | 17.10.2020 | English Books |