Search the Library Catalogue
Advanced microlithography technologies : 8-10 November, 2004, Beijing, China (Record no. 362804)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01367nam a2200277Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2005##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819456007 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 WAN |
| 245 ## - TITLE STATEMENT | |
| Title | Advanced microlithography technologies : 8-10 November, 2004, Beijing, China |
| Statement of responsibility, etc | Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors, ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [et al.] ; supporting organizations, National Natural Science Foundation of China ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xi, 380 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Masks - Congresses |
| Topical Term | Manufacturing processes - Congresses |
| Topical Term | Microlithography - Congresses |
| Topical Term | X-ray lithography - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Progler, Christopher J |
| Personal name | Wang, Yangyuan |
| Personal name | Yao, Jun'en |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Australian Optical Society, Guo jia zi ran ke xue ji jin wei yuan hui (China), Society of Photo-optical Instrumentation Engineers, Zhongguo guang xue xue hui |
| 991 ## - | |
| -- | 377174 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 17.10.2020 | 621.381531 WAN | 417517 | 17.10.2020 | English Books |