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Advanced microelectronic processing techniques : 28-30 November 2000, Singapore (Record no. 362803)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01308nam a2200277Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2000##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819438997 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 HAR |
| 245 ## - TITLE STATEMENT | |
| Title | Advanced microelectronic processing techniques : 28-30 November 2000, Singapore |
| Statement of responsibility, etc | H. Barry Harrison, Andrew T.S. Wee, Subhash Gupta, chairs/editors, ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xix, 212 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Errata p. tipped in. Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Epitaxy - Congresses |
| Topical Term | Integrated circuits - Design and construction - Congresses |
| Topical Term | Semiconductor wafers - Congresses |
| Topical Term | Semiconductors - Characterization - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gupta, Subhash |
| Personal name | Harrison, H. Barry |
| Personal name | Wee, Andrew T. S |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 370746 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 17.10.2020 | 621.38152 HAR | 276695 | 17.10.2020 | English Books |