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Metrology, inspection, and process control for microlithography XIII : 15-18 march, 1999, Santa Clara, California (Record no. 273580)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01182nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s1999##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819431516 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 SIN |
| 245 ## - TITLE STATEMENT | |
| Title | Metrology, inspection, and process control for microlithography XIII : 15-18 march, 1999, Santa Clara, California |
| Statement of responsibility, etc | Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c1999 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 2 v. (xv, 1052 p.) : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Inspection - Congresses |
| Topical Term | Integrated circuits - Measurement - Congresses |
| Topical Term | Microlithography - Congresses |
| Topical Term | Process control - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Singh, Bhanwar |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 357908 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.381531 SIN | 277517 | 13.10.2020 | English Books | ||||
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.381531 SIN | 277518 | 13.10.2020 | English Books |