Search the Library Catalogue
Advances in resist materials and processing technology XXIV : 26-28 February, 2007, San Jose, California, USA (Record no. 240693)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01044nam a2200229Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2007##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819466389 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 DUP |
| 245 ## - TITLE STATEMENT | |
| Title | Advances in resist materials and processing technology XXIV : 26-28 February, 2007, San Jose, California, USA |
| Statement of responsibility, etc | Qinghuang Lin, editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMATECH |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2007 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 2 v. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Previous conference proceedings entitled: Advances in resist technology and processing. Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microlithography - Congresses |
| Topical Term | Photoresists - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Lin, Qinghuang |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | SEMATECH (Organization), Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 376202 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.381 DUP | 276704 | 13.10.2020 | English Books | ||||
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.381 DUP | 276705 | 13.10.2020 | English Books |