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Handbook of microlithography, micromachining, and microfabrication (Record no. 238496)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00754nam a2200229Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s1997##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 0819423785 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 670 CHO |
| 245 ## - TITLE STATEMENT | |
| Title | Handbook of microlithography, micromachining, and microfabrication |
| Statement of responsibility, etc | P. Rai-Choudhury, editor |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | Institution of Electrical Engineers, SPIE Optical Engineering Press |
| Year of publication | c1997 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 768 p. : ill. ; 26 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and indexes |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microfabrication |
| Topical Term | Microlithography |
| Topical Term | Micromachining |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Rai-Choudhury, P |
| 991 ## - | |
| -- | 265344 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 670 CHO | 424292 | 13.10.2020 | English Books |