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000 -LEADER | |
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fixed length control field | 01353nam a2200205Ia 4500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 191130s2004##################000#0#eng## |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
ISBN | 9780819454379 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815 BEH |
245 ## - TITLE STATEMENT | |
Title | 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany |
Statement of responsibility, etc | Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ..[et al.] |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication | Bellingham, WA |
Name of publisher | SPIE |
Year of publication | c2004 |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | xxiv, 210 p. : ill. ; 28 cm. |
500 ## - GENERAL NOTE | |
General note | Includes bibliographical references and index |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Integrated circuits - Masks - Congresses |
Topical Term | Microlithography - Congresses |
700 ## - ADDED ENTRY--PERSONAL NAME | |
Personal name | Behringer, Uwe F. W |
710 ## - ADDED ENTRY--CORPORATE NAME | |
Corporate name or jurisdiction name as entry element | European Conference on Mask Technology for Integrated Circuits and Microcomponents (20th : 2004 : Dresden, Germany), Forschungszentrum Karlsruhe. Institute for Microstructure Technology, Semiconductor Equipment and Materials International, Europe, Society of Photo-optical Instrumentation Engineers, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik |
Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
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Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.3815 BEH | 276658 | 13.10.2020 | English Books |