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18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany (Record no. 236624)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01172nam a2200205Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2002##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819445315 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815 BEH |
| 245 ## - TITLE STATEMENT | |
| Title | 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany |
| Statement of responsibility, etc | Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ..[et al. ; published by SPIE--The International Society for Optical Engineering] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c2002 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiii, 256 p. : ill. ; 28 cm. |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Masks - Congresses |
| Topical Term | Microlithography - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Behringer, Uwe F. W |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | European Conference on Mask Technology for Integrated Circuits and Microcomponents (18th : 2002 : Munich, Germany), Society of Photo-optical Instrumentation Engineers, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.3815 BEH | 397558 | 13.10.2020 | English Books |