Search the Library Catalogue
Lithography for semiconductor manufacturing II : 30 may-1 June, 2001, Edinburgh, UK (Record no. 234068)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01321nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2001##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819441058 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 670 MAC |
| 245 ## - TITLE STATEMENT | |
| Title | Lithography for semiconductor manufacturing II : 30 may-1 June, 2001, Edinburgh, UK |
| Statement of responsibility, etc | Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | vii, 422 p. : ill. (some col.) ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Design and construction - Congresses |
| Topical Term | Integrated circuits - Very large scale integration - Congresses |
| Topical Term | Microlithography - Congresses |
| Topical Term | Semiconductors - Etching - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Mack, Chris A |
| Personal name | Stevenson, Tom |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | European Optical Society, Institution of Electrical Engineers, Scottish Enterprise, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 342016 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 670 MAC | 423740 | 13.10.2020 | English Books |