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Interlayer dielectrics for semiconductor technologies (Record no. 217375)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00596nam a2200193Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2003##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780125112215 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 MUR |
| 245 ## - TITLE STATEMENT | |
| Title | Interlayer dielectrics for semiconductor technologies |
| Statement of responsibility, etc | edited by S P Murarka,Eizenberg M and Sinha A K |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Amsterdam ; Boston |
| Name of publisher | Elsevier, Elsevier / Academic Press |
| Year of publication | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv,444p |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Eizenberg, M |
| Personal name | Murarka, S P |
| Personal name | Sinha A K |
| 991 ## - | |
| -- | 157448 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.38152 MUR | 292764 | 13.10.2020 | English Books |