Handbook of silicon wafer cleaning technology (Record no. 201055)

MARC details
000 -LEADER
fixed length control field 00713nam a2200229Ia 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 191130s2008##################000#0#eng##
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9780815515548
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38152 REI
245 ## - TITLE STATEMENT
Title Handbook of silicon wafer cleaning technology
Statement of responsibility, etc edited by Karen A. Reinhardt, Werner Kern
250 ## - EDITION STATEMENT
Edition statement 2nd ed
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Norwich, NY
Name of publisher William Andrew
Year of publication 2008
300 ## - PHYSICAL DESCRIPTION
Number of Pages xxvi, 718 p. : ill. ; 24 cm
500 ## - GENERAL NOTE
General note Includes bibliographical references and index
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Silicon-on-insulator technology
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Kern, Werner
Personal name Reinhardt, Karen A
991 ## -
-- 166228
Holdings
Withdrawn status Lost status Damaged status Not for loan Home library Current library Date acquired Full call number Accession Number Price effective from Koha item type
        Anna Centenary Library Anna Centenary Library 13.10.2020 621.38152 REI 340347 13.10.2020 English Books

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