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Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices (Record no. 18499)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00856nam a2200241Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2009##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781420059113 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2008051282 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 PAI |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Paik, Ungyu |
| 245 ## - TITLE STATEMENT | |
| Title | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices |
| Statement of responsibility, etc. | Ungyu Paik, Jea-Gun Park |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton, FL |
| Name of publisher, distributor, etc. | CRC Press/Taylor & Francis Group |
| Date of publication, distribution, etc. | 2009 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiii, 191 p., [14] p. of plates : ill. (some col.) ; 25 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references (p. 171-175) and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Chemical mechanical planarization |
| Topical term or geographic name entry element | Nanoelectronics |
| Topical term or geographic name entry element | Nanoparticles |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Park, Jea-Gun |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | 3442b0c6ac10000c3ef576d1cb176d53 |
| 991 ## - | |
| -- | 153278 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| hbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.38152 PAI | 145138 | 09.10.2020 | 09.10.2020 | English Books |