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Extreme ultraviolet lithography (Record no. 180597)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00758nam a2200241Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2009##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780071549189 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 WU |
| 245 ## - TITLE STATEMENT | |
| Title | Extreme ultraviolet lithography |
| Statement of responsibility, etc | [edited by] Banqiu Wu, Ajay Kumar |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | New York |
| Name of publisher | McGraw-Hill |
| Year of publication | 2009 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv, 465 p. : ill. ; 24 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Extreme ultraviolet lithography |
| Topical Term | Integrated circuits - Design and construction |
| Topical Term | Integrated circuits - Masks |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Kumar, Ajay |
| Personal name | Wu, Banqiu |
| 991 ## - | |
| -- | 153300 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 13.10.2020 | 621.381531 WU | 255837 | 13.10.2020 | English Books |