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EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008, Dresden, Germany (Record no. 159831)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01278nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2008##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819469564 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38173 BEH |
| 245 ## - TITLE STATEMENT | |
| Title | EMLC 2008 : 24th European mask and lithography conference : 21-24 January 2008, Dresden, Germany |
| Statement of responsibility, etc | Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, WA |
| Name of publisher | SPIE |
| Year of publication | c2008 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 v. (various pagings) : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Masks - Congresses |
| Topical Term | Microlithography - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Behringer, Uwe F. W |
| Personal name | Maurer, Wilhelm |
| Personal name | Waelpoel, Jacques |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | BACUS (Technical group), European Mask and Lithography Conference (24th : 2008 : Dresden, Germany), Society of Photo-optical Instrumentation Engineers, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik |
| 991 ## - | |
| -- | 368920 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 621.38173 BEH | 276677 | 12.10.2020 | English Books |