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Emerging lithographic technologies XI 27 February-1 march 2007, San Jose, California, USA (Record no. 159678)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00638nam a2200193Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2007##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819466365 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 LER |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Lercel, Michael J |
| 245 ## - TITLE STATEMENT | |
| Title | Emerging lithographic technologies XI 27 February-1 march 2007, San Jose, California, USA |
| Statement of responsibility, etc | Michael J.Lercel |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | California |
| Name of publisher | SPIE - Proceeding |
| Year of publication | 2007 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | various pagings. ; 30 cm |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Lithography, Electron beam |
| Topical Term | Lithography--Industrial applications |
| 991 ## - | |
| -- | 360422 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 621.381531 LER | 417700 | 12.10.2020 | English Books |