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Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia (Record no. 148789)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01535nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2008##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819469717 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 TAN |
| 245 ## - TITLE STATEMENT | |
| Title | Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia |
| Statement of responsibility, etc | Hark Hoe Tan ... [et al.], editors ; sponsored by SPIE ; cosponsored by the Australian National University (Australia) ... [et al.] ; cooperating organizations, Research School of Physical Sciences and Engineering, Canberra (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2008 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | 1 v. (various pagings) : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics. Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Microelectromechanical systems - Congresses |
| Topical Term | Nanotechnology - Congresses |
| Topical Term | Photolithography - Congresses |
| Topical Term | Photomechanical processes - Congresses |
| Topical Term | Photonics - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tan, Hark Hoe |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Australian National University, Australian National University. Research School of Physical Sciences, Society of Photo-optical Instrumentation Engineers, University of Adelaide. Centre for Biomedical Engineering |
| 991 ## - | |
| -- | 367245 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 621.381 TAN | 417651 | 12.10.2020 | English Books |