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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA (Record no. 147489)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01311nam a2200277Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2005##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819457363 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381 LIE |
| 245 ## - TITLE STATEMENT | |
| Title | Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA |
| Statement of responsibility, etc | Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxxv, 438 p. : ill. (some col.) ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Integrated circuits - Defects - Analysis - Congresses |
| Topical Term | Integrated circuits - Design and construction - Congresses |
| Topical Term | Microelectronics industry - Quality control - Congresses |
| Topical Term | Quality control - Congresses |
| Topical Term | Semiconductor wafers - Defects - Analysis - Congresses |
| Topical Term | Semiconductors - Design and construction - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Liebmann, Lars W |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | International SEMATECH, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 367361 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 621.381 LIE | 417668 | 12.10.2020 | English Books |