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Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA (Record no. 144806)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01281nam a2200253Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2004##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9780819452917 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 660.2815 TOB |
| 245 ## - TITLE STATEMENT | |
| Title | Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA |
| Statement of responsibility, etc | Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Bellingham, Wash |
| Name of publisher | SPIE |
| Year of publication | c2004 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xxx, 248 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Intelligent control systems - Mathematical models - Congresses |
| Topical Term | Manufacturing processes - Automatic control - Congresses |
| Topical Term | Manufacturing processes - Mathematical models - Congresses |
| Topical Term | Process control - Mathematical models - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Tobin, Kenneth W |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | International SEMATECH, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers |
| 991 ## - | |
| -- | 334302 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 660.2815 TOB | 417639 | 12.10.2020 | English Books |