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Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology (Record no. 127352)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01049nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2002##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| ISBN | 9781402071935 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 BOR |
| 100 ## - MAIN ENTRY--AUTHOR NAME | |
| Personal name | Borst, Christopher L |
| 245 ## - TITLE STATEMENT | |
| Title | Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses : fundamental mechanisms and application to IC interconnect technology |
| Statement of responsibility, etc | by Christopher L. Borst, William N. Gill, Ronald J. Gutmann |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication | Deventer, The Netherlands ; Boston, MA |
| Name of publisher | Kluwer Academic Publishers |
| Year of publication | 2002 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Number of Pages | xiv, 229 p. : ill. ; 25 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical Term | Chemical mechanical planarization |
| Topical Term | Grinding and polishing |
| Topical Term | Interconnects (Integrated circuit technology) |
| Topical Term | Semiconductors - Polishing |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Gill, William N |
| Personal name | Gutmann, Ronald J |
| 991 ## - | |
| -- | 149096 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Full call number | Accession Number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 12.10.2020 | 621.38152 BOR | 304305 | 12.10.2020 | English Books |