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Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany (Record no. 12386)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01166nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2009##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819476739 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2010459267 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 681.25 BOS |
| 245 ## - TITLE STATEMENT | |
| Title | Modeling aspects in optical metrology II : 15-16 June 2009, Munich, Germany |
| Statement of responsibility, etc. | Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society [and] WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | 2009 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 v. (various pagings) : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits - Congresses |
| Topical term or geographic name entry element | Optical measurements - Congresses |
| Topical term or geographic name entry element | Semiconductors - Design and construction - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Bodermann, Bernd |
| Personal name | Bosse, Harald |
| Personal name | Silver, Richard M |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | European Optical Society, SPIE (Society), SPIE Europe, Wissenschaftliche Gesellschaft Lasertechnik |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | abd32afeac10000c69f40f62cf82faf9 |
| 991 ## - | |
| -- | 344588 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 681.25 BOS | 423909 | 09.10.2020 | 09.10.2020 | English Books |