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Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA (Record no. 10252)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01616nam a2200301Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2005##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819456946 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2005296016 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.36 JON |
| 245 ## - TITLE STATEMENT | |
| Title | Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA |
| Statement of responsibility, etc. | Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA) |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | c2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xl, 282 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | First conference has title: Micromachining technology for micro-optics. Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated optics - Congresses |
| Topical term or geographic name entry element | Microelectromechanical systems - Congresses |
| Topical term or geographic name entry element | Micromachining - Congresses |
| Topical term or geographic name entry element | Miniature electronic equipment - Design and construction - Congresses |
| Topical term or geographic name entry element | Optoelectronic devices - Design and construction - Congresses |
| Topical term or geographic name entry element | Victoria and Albert Museum |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Johnson, Eric G |
| Personal name | Nordin, Gregory P |
| Personal name | Suleski, Thomas J |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Sandia National Laboratories, Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization) |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | 027105f7ac10000c4ef7c3b7d92848fa |
| 991 ## - | |
| -- | 388199 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| pbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.36 JON | 277418 | 09.10.2020 | 09.10.2020 | English Books |