Search the Library Catalogue
Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA (Record no. 10245)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01246nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2003##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819447791 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2004296874 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 671.35 YAS |
| 245 ## - TITLE STATEMENT | |
| Title | Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA |
| Statement of responsibility, etc. | John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | 2003 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 604 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and author index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electromechanical devices - Design and construction - Congresses |
| Topical term or geographic name entry element | Microfabrication - Congresses |
| Topical term or geographic name entry element | Micromachining - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Karam, Jean-Michel |
| Personal name | Perez-Maher, Mary Ann |
| Personal name | Yasaitis, John |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | ef80df5bac10000c27e5ca3e1a060249 |
| 991 ## - | |
| -- | 379923 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| pbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 671.35 YAS | 277417 | 09.10.2020 | 09.10.2020 | English Books |