Search the Library Catalogue
Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore (Record no. 10233)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 01268nam a2200265Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 191130s2000##################000#0#eng## |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819438980 |
| 022 ## - INTERNATIONAL STANDARD SERIAL NUMBER | |
| International Standard Serial Number | 2001277535 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | ACL |
| Transcribing agency | ACL |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3815 MAC |
| 245 ## - TITLE STATEMENT | |
| Title | Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore |
| Statement of responsibility, etc. | Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Bellingham, WA |
| Name of publisher, distributor, etc. | SPIE |
| Date of publication, distribution, etc. | 2000 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xv, 194 p. : ill. ; 28 cm |
| 500 ## - GENERAL NOTE | |
| General note | Includes bibliographical references and index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits - Design and construction - Congresses |
| Topical term or geographic name entry element | Integrated circuits - Inspection - Congresses |
| Topical term or geographic name entry element | Microlithography - Industrial applications - Congresses |
| Topical term or geographic name entry element | Process control - Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Mack, Chris A |
| Personal name | Yuan, Xiaocong |
| 710 ## - ADDED ENTRY--CORPORATE NAME | |
| Corporate name or jurisdiction name as entry element | Institute of Physics, Singapore, Nanyang Technological University, Society of Photo-optical Instrumentation Engineers |
| 990 ## - EQUIVALENCES OR CROSS-REFERENCES [LOCAL, CANADA] | |
| Link information for 9XX fields | e9802f8cac10000c18897fc3997587b4 |
| 991 ## - | |
| -- | 376461 |
| Withdrawn status | Lost status | Materials specified (bound volume or other part) | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| pbk | Anna Centenary Library | Anna Centenary Library | 09.10.2020 | 621.3815 MAC | 424035 | 09.10.2020 | 09.10.2020 | English Books |