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Micro mechanical systems : principles and technology

Micro mechanical systems : principles and technology edited by T. Fukuda and W. Menz - Amsterdam Elsevier 1998 - viii, 268 p. : ill. ; 25 cm

Includes bibliographical references

ISBN: 9780444823632

ISSN: 98020529

Subjects--Topical Terms:
Microelectromechanical systems - Handbooks, manuals, etc

Dewey Class. No.: 621 FUK

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