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Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA

Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering - Bellingham, WA SPIE c2001 - vii, 156 p. : ill. ; 28 cm

Includes bibliographical references and index

ISBN: 9780819439536

ISSN: 2001275710

Subjects--Topical Terms:
Lasers - Industrial applications - Congresses
Metrology - Congresses
Microelectronics industry - Quality control - Congresses
Optoelectronic devices - Industrial applications - Congresses
Surfaces (Technology) - Measurement - Congresses

Dewey Class. No.: 621.381 TOB

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Metrology-based control for micro-manufacturing : 24-25 January 2001, San Jose [Calif.], USA

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