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Metal impurities in silicon-device fabrication

Graff, Klaus

Metal impurities in silicon-device fabrication Klaus Graff - 2nd, rev. ed - Berlin Springer c2000 - xv, 268 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9783540642138

ISSN: 99058100

Subjects--Topical Terms:
Contamination (Technology)
Semiconductors - Defects
Silicon - Defects
Silicon - Inclusions

Dewey Class. No.: 621.38152 GRA

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