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MEMS/MOEMS packaging : concepts, designs, materials, and processes

Gilleo, Ken

MEMS/MOEMS packaging : concepts, designs, materials, and processes Ken Gilleo - New York McGraw-Hill 2005 - xiii, 220 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780071455565

ISSN: 2005049594

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronic packaging
Optoelectronic devices

Dewey Class. No.: 621.381046 GIL

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