MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA
Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)
- Bellingham, WA SPIE c2008
- 1 v. (various pagings) : ill. ; 28 cm
Includes bibliographical references and author index