MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA

MEMS/MOEMS components and their applications V : special focus topics : transducers at the micro-nano interface : 21-22 January 2008, San Jose, California, USA Srinivas A. Tadigadapa, Babak A. Parviz, Albert K. Henning, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA) - Bellingham, WA SPIE c2008 - 1 v. (various pagings) : ill. ; 28 cm

Includes bibliographical references and author index

9780819470607

2010459242


Dispositifs optoélectroniques - Congrès
Microelectromechanical systems - Congresses
Microsystèmes électromécaniques - Congrès
Optoelectronic devices - Congresses
Transducers - Congresses
Transducteurs - Congrès

621.381 TAD

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