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MEMS and microsystems : design, manufacture, and nanoscale engineering

Hsu, Tai-Ran

MEMS and microsystems : design, manufacture, and nanoscale engineering Tai-Ran Hsu - 2nd ed - Hoboken, NJ John Wiley 2008 - xxv, 550 p. : ill. ; 25 cm

Includes bibliographical references (p. 509-521) and index

ISBN: 9780470083017

ISSN: 2007017041

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronic packaging
Microelectronics

Dewey Class. No.: 621.381 HSU

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