Normal view MARC view ISBD view

Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998

Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998 editors, Marc Heybs, Marc Meuris and Paul Mertens - Switzerland Scitec Publications 1999 - xiv, 301 p. : ill. ; 25 cm

Includes index

ISBN: 9783908450405

Subjects--Topical Terms:
Silicon surfaces
Ultra clean processing

Dewey Class. No.: 621.38152 HEY

Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Ultra clean processing of silicon surfaces : proceedings of the fourth international symposium on ultra clean processing of silicon surfaces (UCPSS '98), held in Ostend, Belgium, September 21 - 23, 1998

Find us on the map