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Tribology in chemical-mechanical planarization

Liang, Hong

Tribology in chemical-mechanical planarization Hong Liang, David Craven - Boca Raton, FL Taylor & Francis 2005 - 185 p. : ill. ; 25 cm

Includes bibliographical references and index

ISBN: 9780824725679

ISSN: 2004058221

Subjects--Topical Terms:
Chemical mechanical planarization
Grinding and polishing
Tribology

Dewey Class. No.: 621.92 LIA

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