Normal view MARC view ISBD view

The science and engineering of microelectronic fabrication

Campbell, Stephen A

The science and engineering of microelectronic fabrication Stephen A. Campbell - 2nd ed - Oxford Oxford University Press 2001 - xiv, 603 p. : ill. ; 24 cm

Includes bibliographical references and index

ISBN: 9780195136050

ISSN: 51022

Subjects--Topical Terms:
Semiconductors - Design and construction

Dewey Class. No.: 621.38152 CAM

Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

The science and engineering of microelectronic fabrication

Find us on the map