Reliability, Packaging, Testing, And Characterization Of Mems/moems Vi : 23-24 January, 2007, San Jose, California, Usa

Hartzell, Allyson L. ; Ramesham, Rajeshuni

Reliability, Packaging, Testing, And Characterization Of Mems/moems Vi : 23-24 January, 2007, San Jose, California, Usa / edited by Allyson L. Hartzell, Rajeshuni Ramesham - 1st ed. - Bellingham Spie c2007 - ix, (various pagings) : ill. ; 29 cm. - Proceedings of SPIE--the International Society for Optical Engineering, v. 6463 .

Includes index

9780819465764


Microelectromechanical Systems Reliability Congresses
Microelectronic packaging

621.381 / HAR

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